Dynamic characteristics and positioning performance
of piezoactuator-integrate ball screw drive
Tomoya Fujita, Daisuke Kono, Atsushi Matsubara, Iwao Yamaji, Soichi Ibaraki
Abstract
This paper presents a new fine and coarse (dual) positioning system with a piezoelectric actuator integrated into the support unit of a ball screw. On the developed system, frequency response tests were carried out and a dual controller was designed. By using this dual positioning system, positioning tests were carried out. Test results show that the positioning system has good tracking capability with a tracking error of less than 0.2 um by decreasing the stick motion.
Key Words: Precision positioning, Dual servo control, Ball screw drive, Piezoelectric actuator
|
