Laser Step Diagonal Measurement for the Estimation
of Three-dimensional Volumetric Errors
Takafumi Hata, Soichi Ibaraki, Atsushi Matsubara
Abstract
The laser step diagonal measurement is a method for the identification of all the volumetric error components, including linear displacement errors, straightness and squareness errors by using only a laser interferometer and a flat mirror. This research first discusses inherent and critical issues with the conventional formulation of the laser step diagonal measurement. Then, we propose a new formulation of the laser step diagonal measurement to accurately estimate the machine’s volumetric errors even under the existence of setup errors.
Key Words: Step diagonal measurement, volumetric error, laser interferometer
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