A Single-Axis Tracking Interferometer to Measure 2D Error Motions of Machine Tools
Daichi Maruyama, Tsukasa Sato, Soichi Ibaraki
 
 
 
Abstract
 
The volumetric accuracy of a machine tool generally
changes with time. Its periodic check, performed at a user’s site
in a semi-automated manner, can be a key to ensure sufficient
volumetric accuracy in a long term. The multilateration
measurement, performed by using a tracking interferometer
(laser tracker), can measure all the error motions of three linear
axes. However, its higher instrumental cost prevents its wider
implementation. This paper presents a prototype design of a
tracking interferometer with a single rotary axis only. Since
higher assembly accuracy is not required, it can be constructed
with much lower cost. By using this instrument, a single tracking
test is performed with two linear axes, in addition to direct
measurement of their linear positioning deviations. An algorithm
to identify 2D error motions of the two linear axes is presented.
Experimental demonstration is presented to investigate its
measurement accuracy.
 
Keywords: machine tools, error motions, measurement, tracking
interferometer, multilateration
 
 
 
 
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